Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining

Published 2012 View Full Article

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Title
Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 187, Issue -, Pages 127-131
Publisher
Elsevier BV
Online
2012-09-04
DOI
10.1016/j.sna.2012.08.024

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