Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining

标题
Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 187, Issue -, Pages 127-131
出版商
Elsevier BV
发表日期
2012-09-04
DOI
10.1016/j.sna.2012.08.024

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