5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

Published 2009 View Full Article

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Title
5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 156, Issue 1, Pages 28-35
Publisher
Elsevier BV
Online
2009-03-01
DOI
10.1016/j.sna.2009.02.007

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