5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

出版年份 2009 全文链接

标题

5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

作者

关键词

-

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 156, Issue 1, Pages 28-35

出版商

Elsevier BV

发表日期

2009-03-01

DOI

10.1016/j.sna.2009.02.007

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