Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Published 2008 View Full Article

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Title
Design, fabrication and characterization of an externally actuated ON/OFF microvalve
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 147, Issue 2, Pages 600-606
Publisher
Elsevier BV
Online
2008-07-03
DOI
10.1016/j.sna.2008.06.022

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