期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 147, 期 2, 页码 600-606出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2008.06.022
关键词
magnetic-structural analysis; ON/OFF microvalve; check-valve
A magnetic microfluidic valve has been designed, fabricated and tested. Operation relies on the use of a permanent magnet which interacts with an electrodeposited layer of Co-Ni (soft magnetic material) on a V-shaped cantilever beam. The deflection caused by the magnetic forces opens or closes the fluid flow. The microvalve performance has been optimized by means of finite element analysis (FEA). The FEA model has been experimentally validated using confocal microscopy and used to improve the magnetic circuit. Then, a fluidic cell has been built and the microvalve has been demonstrated to work as a check-valve or as ON/OFF valve when being magnetically actuated. Fabricated prototypes were evaluated in a flow of N-2 at the flow rate of 20 sccm. The operational applied pressure was 50 mbar. The microvalve has a leaking rate in the order of 1.75 sccrn at 50 mbar. (c) 2008 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据