Pneumatic gas regulator with cascaded PDMS seal valves

Published 2007 View Full Article

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Title
Pneumatic gas regulator with cascaded PDMS seal valves
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 143, Issue 1, Pages 84-89
Publisher
Elsevier BV
Online
2007-08-03
DOI
10.1016/j.sna.2007.07.028

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