Pneumatic gas regulator with cascaded PDMS seal valves

标题
Pneumatic gas regulator with cascaded PDMS seal valves
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 143, Issue 1, Pages 84-89
出版商
Elsevier BV
发表日期
2007-08-03
DOI
10.1016/j.sna.2007.07.028

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