Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation

A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

(2022) Yuan Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Parametric amplification of a resonant MEMS mirror with all-piezoelectric excitation

(2022) J. Pribošek et al.   APPLIED PHYSICS LETTERS

A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation

(2022) Lei Xu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Dispersive Resonance Modulation Based on the Mode-Coupling Effect in a Capacitive Micromechanical Resonator

(2022) Kuo Lu et al.   Physical Review Applied

An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer

(2022) Liangbo Ma et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

(2021) Chengxin Li et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators

(2021) Milind Pandit et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A sensitive micromachined resonant accelerometer for moving-base gravimetry

(2021) Zhengxiang Fang et al.   SENSORS AND ACTUATORS A-PHYSICAL

A vibrating beam MEMS accelerometer for gravity and seismic measurements

(2020) Arif Mustafazade et al.   Scientific Reports

Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration

(2020) Xiangguang Han et al.   Microsystems & Nanoengineering

Using Electrostatic Spring Softening Effect to Enhance Sensitivity of MEMS Resonant Accelerometers

(2020) Xingyin Xiong et al.   IEEE SENSORS JOURNAL

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

(2019) Yonggang Yin et al.   SENSORS

Additive manufacturing of resonant fluidic sensors based on photonic bandgap waveguides for terahertz applications

(2019) Yang Cao et al.   OPTICS EXPRESS

Toward High-Resolution Inertial Sensors Employing Parametric Modulation in Coupled Micromechanical Resonators

(2019) Chun Zhao et al.   Physical Review Applied

Strong indirect coupling between graphene-based mechanical resonators via a phonon cavity

(2018) Gang Luo et al.   Nature Communications

Light-Mediated Cascaded Locking of Multiple Nano-Optomechanical Oscillators

(2017) E. Gil-Santos et al.   PHYSICAL REVIEW LETTERS

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

(2015) Chun Zhao et al.   SENSORS AND ACTUATORS A-PHYSICAL

Coherent phonon manipulation in coupled mechanical resonators

(2013) Hajime Okamoto et al.   Nature Physics

Optical cavity cooling of mechanical modes of a semiconductor nanomembrane

(2012) K. Usami et al.   Nature Physics