Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 141, Issue 2, Pages 523-529Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2007.10.004
Keywords
tunable resonator; electrostatic force; frequency tuning; stiffness tuning; microresonator; surface micromachining; MEMS
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Frequency tunable comb resonators have been successfully designed and demonstrated based on a closed-form approach of a curved comb finger contour. Experimentally, the resonant frequency of a laterally driven comb resonator with 186 pairs of curved finger contour has been reduced by 55% from the initial frequency of 19 kHz under a bias voltage of 150 V The corresponding effective stiffness has been decreased by 80% from the initial value of 2.64 N/m. This closed-form design approach could be extended to microsystems based on electrostatic comb-shape structures such as microaccelerometers, microgyroscopes, and micromechanical filters. (c) 2007 Elsevier B.V. All rights reserved.
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