CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

Published 2008 View Full Article

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Title
CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials
Authors
Keywords
-
Journal
SENSORS
Volume 8, Issue 4, Pages 2662-2672
Publisher
MDPI AG
Online
2008-12-01
DOI
10.3390/s8042662

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