CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

标题
CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials
作者
关键词
-
出版物
SENSORS
Volume 8, Issue 4, Pages 2662-2672
出版商
MDPI AG
发表日期
2008-12-01
DOI
10.3390/s8042662

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