Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

Published 2008 View Full Article

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Title
Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Authors
Keywords
-
Journal
SENSORS
Volume 8, Issue 2, Pages 767-783
Publisher
MDPI AG
Online
2008-12-01
DOI
10.3390/s8020767

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