Charge trapping and reliability characteristics of sputtered Y2O3high-kdielectrics on N- and S-passivated germanium

Title
Charge trapping and reliability characteristics of sputtered Y2O3high-kdielectrics on N- and S-passivated germanium
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 24, Issue 8, Pages 085006
Publisher
IOP Publishing
Online
2009-07-04
DOI
10.1088/0268-1242/24/8/085006

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