Design of gate stacks for improved program/erase speed, retention and process margin aiming next generation metal nanocrystal memories

Title
Design of gate stacks for improved program/erase speed, retention and process margin aiming next generation metal nanocrystal memories
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 24, Issue 11, Pages 115009
Publisher
IOP Publishing
Online
2009-10-10
DOI
10.1088/0268-1242/24/11/115009

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