Tunable work functions of platinum gate electrode on HfO2 thin films for metal-oxide-semiconductor devices

Published 2008 View Full Article

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Title
Tunable work functions of platinum gate electrode on HfO2 thin films for metal-oxide-semiconductor devices
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 10, Pages 102901
Publisher
AIP Publishing
Online
2008-03-11
DOI
10.1063/1.2892045

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