Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching

Title
Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching
Authors
Keywords
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Journal
RSC Advances
Volume 5, Issue 88, Pages 72051-72057
Publisher
Royal Society of Chemistry (RSC)
Online
2015-08-25
DOI
10.1039/c5ra11875a

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