Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching
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Title
Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching
Authors
Keywords
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Journal
RSC Advances
Volume 5, Issue 88, Pages 72051-72057
Publisher
Royal Society of Chemistry (RSC)
Online
2015-08-25
DOI
10.1039/c5ra11875a
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