Giant Piezoelectricity on Si for Hyperactive MEMS

标题
Giant Piezoelectricity on Si for Hyperactive MEMS
作者
关键词
-
出版物
SCIENCE
Volume 334, Issue 6058, Pages 958-961
出版商
American Association for the Advancement of Science (AAAS)
发表日期
2011-11-18
DOI
10.1126/science.1207186

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