The study on the nanomachining property and cutting model of single-crystal sapphire by atomic force microscopy

Published 2014 View Full Article

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Title
The study on the nanomachining property and cutting model of single-crystal sapphire by atomic force microscopy
Authors
Keywords
-
Journal
SCANNING
Volume 36, Issue 6, Pages 599-607
Publisher
Wiley
Online
2014-09-19
DOI
10.1002/sca.21160
References
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