The study on the nanomachining property and cutting model of single-crystal sapphire by atomic force microscopy

标题
The study on the nanomachining property and cutting model of single-crystal sapphire by atomic force microscopy
作者
关键词
-
出版物
SCANNING
Volume 36, Issue 6, Pages 599-607
出版商
Wiley
发表日期
2014-09-19
DOI
10.1002/sca.21160

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