A non-contact, thermal noise based method for the calibration of lateral deflection sensitivity in atomic force microscopy

Title
A non-contact, thermal noise based method for the calibration of lateral deflection sensitivity in atomic force microscopy
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 85, Issue 11, Pages 113703
Publisher
AIP Publishing
Online
2014-11-20
DOI
10.1063/1.4901221

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