Development of metal nanocluster ion source based on dc magnetron plasma sputtering at room temperature

Title
Development of metal nanocluster ion source based on dc magnetron plasma sputtering at room temperature
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 80, Issue 9, Pages 095103
Publisher
AIP Publishing
Online
2009-09-05
DOI
10.1063/1.3213612

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