Development of metal nanocluster ion source based on dc magnetron plasma sputtering at room temperature

出版年份 2009 全文链接

标题

Development of metal nanocluster ion source based on dc magnetron plasma sputtering at room temperature

作者

关键词

-

出版物

REVIEW OF SCIENTIFIC INSTRUMENTS

Volume 80, Issue 9, Pages 095103

出版商

AIP Publishing

发表日期

2009-09-05

DOI

10.1063/1.3213612

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