Effect of ion beam irradiation on the structure of ZnO films deposited by a dc arc plasmatron

Title
Effect of ion beam irradiation on the structure of ZnO films deposited by a dc arc plasmatron
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 2, Pages 02C504
Publisher
AIP Publishing
Online
2008-02-07
DOI
10.1063/1.2804627

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