Effect of ion beam irradiation on the structure of ZnO films deposited by a dc arc plasmatron

标题
Effect of ion beam irradiation on the structure of ZnO films deposited by a dc arc plasmatron
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 2, Pages 02C504
出版商
AIP Publishing
发表日期
2008-02-07
DOI
10.1063/1.2804627

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