Properties of doped ZnO transparent conductive thin films deposited by RF magnetron sputtering using a series of high quality ceramic targets

Title
Properties of doped ZnO transparent conductive thin films deposited by RF magnetron sputtering using a series of high quality ceramic targets
Authors
Keywords
-
Journal
RARE METALS
Volume 27, Issue 1, Pages 32-35
Publisher
Springer Nature
Online
2008-03-14
DOI
10.1016/s1001-0521(08)60025-x

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