Properties of doped ZnO transparent conductive thin films deposited by RF magnetron sputtering using a series of high quality ceramic targets

标题
Properties of doped ZnO transparent conductive thin films deposited by RF magnetron sputtering using a series of high quality ceramic targets
作者
关键词
-
出版物
RARE METALS
Volume 27, Issue 1, Pages 32-35
出版商
Springer Nature
发表日期
2008-03-14
DOI
10.1016/s1001-0521(08)60025-x

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