3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems

Title
3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems
Authors
Keywords
-
Journal
PROCEEDINGS OF THE IEEE
Volume 97, Issue 1, Pages 18-30
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-03-06
DOI
10.1109/jproc.2008.2007458

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