Design and preparation of porous polybenzoxazole films using the tert-butoxycarbonyl group as a pore generator and their application for patternable low-k materials

Chemically Amplified Photosensitive Polyimides and Polybenzoxazoles

(2010) Ken-ichi Fukukawa et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Thermal conductivity of cubic and hexagonal mesoporous silica thin films

(2009) Thomas Coquil et al.   JOURNAL OF APPLIED PHYSICS

Development of Photosensitive Poly(benzoxazole) Based on a Poly(o-hydroxy amide), a Dissolution Inhibitor, and a Photoacid Generator

(2009) Tomohito Ogura et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

An Alkaline-Developable, Negative-Working Photosensitive Polybenzoxazole Based on Poly(o-hydroxyamide), a Vinyl Sulfone-Type Cross-Linker, and a Novel Photobase Generator

(2009) Katsuhisa Mizoguchi et al.   MACROMOLECULES

Enhanced conductivity in polybenzoxazoles doped with carboxylated multi-walled carbon nanotubes

(2008) Chengjun Zhou et al.   CARBON

Spin Coating Film Transfer and Hot-Pressing System for Uniform Dielectric Formation and Its Application to Porous Low-kFilm Formation

(2008) Masafumi Kawagoe et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

“Self-Foaming” Poly(phenylquinoxaline)s for the Designing of Macro and Nanoporous Materials

(2008) Samuel Merlet et al.   MACROMOLECULES