An Alkaline-Developable, Negative-Working Photosensitive Polybenzoxazole Based on Poly(o-hydroxyamide), a Vinyl Sulfone-Type Cross-Linker, and a Novel Photobase Generator

Published 2009 View Full Article

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Title
An Alkaline-Developable, Negative-Working Photosensitive Polybenzoxazole Based on Poly(o-hydroxyamide), a Vinyl Sulfone-Type Cross-Linker, and a Novel Photobase Generator
Authors
Keywords
-
Journal
MACROMOLECULES
Volume 42, Issue 11, Pages 3780-3787
Publisher
American Chemical Society (ACS)
Online
2009-04-21
DOI
10.1021/ma900258j

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