Synthesis and Characterization of TiSiON Biocompatible Thin Films Used in Biomedical Applications

The Main aim of the present work was to prepare and investigate TiSiON coatings as possible candidates for biomedical applications. The coatings were obtained by the cathodic arc method at different substrate bias voltages in a reactive atmosphere, N-2 and O-2 gas mixture. Various film properties (elemental and phase composition, texture, hardness, adhesion, corrosion resistance, friction behaviour, biological performance) and their dependence on the substrate bias were determined. The possible use of TiSiON coatings for improving the adhesion between the dental ceramic and metallic substrate in dental restorations has been analysed and discussed.