Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damage

Published 2015 View Full Article

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Title
Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damage
Authors
Keywords
-
Journal
Science of Advanced Materials
Volume 7, Issue 1, Pages 127-132
Publisher
American Scientific Publishers
Online
2015-01-15
DOI
10.1166/sam.2015.2091

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