Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges

Published 2014 View Full Article

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Title
Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 23, Issue 6, Pages 065043
Publisher
IOP Publishing
Online
2014-10-28
DOI
10.1088/0963-0252/23/6/065043

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