Large-area high-density helicon plasma sources

Published 2010 View Full Article

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Title
Large-area high-density helicon plasma sources
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 3, Pages 034018
Publisher
IOP Publishing
Online
2010-05-22
DOI
10.1088/0963-0252/19/3/034018
References
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