Large-area high-density helicon plasma sources

标题
Large-area high-density helicon plasma sources
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 3, Pages 034018
出版商
IOP Publishing
发表日期
2010-05-22
DOI
10.1088/0963-0252/19/3/034018

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