Deposition of nanostructured fluorocarbon plasma polymer films by RF magnetron sputtering of polytetrafluoroethylene

Published 2011 View Full Article

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Title
Deposition of nanostructured fluorocarbon plasma polymer films by RF magnetron sputtering of polytetrafluoroethylene
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 19, Pages 6426-6431
Publisher
Elsevier BV
Online
2011-05-08
DOI
10.1016/j.tsf.2011.04.213

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