Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones

标题
Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 7, Issue 7, Pages 561-570
出版商
Wiley
发表日期
2010-02-01
DOI
10.1002/ppap.200900139

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