期刊
PLASMA PROCESSES AND POLYMERS
卷 6, 期 -, 页码 S514-S518出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200931102
关键词
deposition rate; dielectric barrier discharge (DBD); FTIR-absorption spectroscopy; optical emission spectroscopy; plasma polymerization; XPS
Non-thermal dielectric barrier discharges (DBD) operated in a parallel plate reactor (6 cm width and 1.6 cm long) under atmospheric pressure in He/O-2/HAADSO and He/N2O/HMDSO mixtures at different O-2 or N2O to HMDSO (hexamethyldisiloxane) ratios and different power are studied. The effective power of the discharge was derived by evaluating the Lissajous-figure on the oscilloscope. Emission spectroscopy and FTIR-absorption spectroscopy were applied to get information on the reaction products in DBD. The spectroscopic gas analysis was performed at three residence times. The properties of the polymer films deposited on silicon wafers were measured by FTIR-absorption spectroscopy, AFM and XPS analysis. Surface tension was obtained by contact angle measurements with water. Correlations between parameters of plasma phase with film parameters are discussed.
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