Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2 plasmas
Published 2012 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2 plasmas
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 19, Issue 11, Pages 113502
Publisher
AIP Publishing
Online
2012-11-07
DOI
10.1063/1.4765357
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy
- (2011) Young-Kwang Lee et al. JOURNAL OF APPLIED PHYSICS
- Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy
- (2011) M. A. Song et al. PHYSICS OF PLASMAS
- Measurement of the O2Dissociation Fraction in RF Low Pressure O2/Ar Plasma Using Optical Emission Spectrometry
- (2011) Zhongwei Liu et al. PLASMA SCIENCE & TECHNOLOGY
- Active species downstream of an Ar–O2surface-wave microwave discharge for biomedicine, surface treatment and nanostructuring
- (2011) Kinga Kutasi et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas
- (2011) T. H. Chung et al. AIP Advances
- Theoretical insight into Ar–O2surface-wave microwave discharges
- (2010) Kinga Kutasi et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Improved measurement method for electron energy distribution functions with high accuracy and reliability
- (2010) Jin Young Bang et al. PHYSICS OF PLASMAS
- Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2
- (2009) Y Hayashi et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Spectroscopic Measurement of the Electron Temperature and the Metastable Densities by Using a Simple Collisional-Radiative Model in a Low-Pressure Inductively-Coupled Argon Plasma
- (2009) Young-Kwang Lee et al. JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- A global (volume averaged) model of a nitrogen discharge: I. Steady state
- (2009) E G Thorsteinsson et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy
- (2009) John B Boffard et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- A numerical investigation of atomic oxygen density in an inductively coupled plasma in O2/Ar mixture
- (2008) Toshikazu Sato et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Electrical and spectroscopic characterizations of a low pressure argon discharge created by a broad-band helical coupling device
- (2008) C Foissac et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Determination of the electron temperature in a planar inductive argon plasma with emission spectroscopy and electrostatic probe
- (2008) Namjun Kang et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas
- (2008) M Schulze et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreFind the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
Search