Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2

Title
Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 14, Pages 145206
Publisher
IOP Publishing
Online
2009-06-30
DOI
10.1088/0022-3727/42/14/145206

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