A study of the role of various reactions on the density distribution of hydrogen, silylene, and silyl in SiH4/H2 plasma discharges

Published 2011 View Full Article

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Title
A study of the role of various reactions on the density distribution of hydrogen, silylene, and silyl in SiH4/H2 plasma discharges
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 18, Issue 9, Pages 093502
Publisher
AIP Publishing
Online
2011-09-08
DOI
10.1063/1.3630933
References
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