Microstructure and piezoelectric response of YxAl1−xN thin films

标题

作者

关键词

Yttrium aluminum nitride, Piezoelectric, d, 33, PFM, Reactive sputtering

出版物

Volume 100, Issue -, Pages 81-89

出版商

Elsevier BV

发表日期

2015-08-29

DOI

10.1016/j.actamat.2015.08.019

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