Structural and XPS characterization of ALD Al2O3 coated porous silicon

标题
Structural and XPS characterization of ALD Al2O3 coated porous silicon
作者
关键词
Atomic layer deposition, Aluminum oxide, Porous silicon, XPS
出版物
VACUUM
Volume 113, Issue -, Pages 52-58
出版商
Elsevier BV
发表日期
2014-12-24
DOI
10.1016/j.vacuum.2014.12.015

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