Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)

Title
Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)
Authors
Keywords
-
Journal
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 14, Issue 9, Pages 2979-2982
Publisher
Royal Society of Chemistry (RSC)
Online
2011-12-09
DOI
10.1039/c2cp23268e

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