Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Published 2010 View Full Article

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Title
Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium
Authors
Keywords
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Journal
Physica Status Solidi-Rapid Research Letters
Volume 5, Issue 1, Pages 19-21
Publisher
Wiley
Online
2010-11-18
DOI
10.1002/pssr.201004462
References
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