Carbon nanotube integration into MEMS devices

Published 2010 View Full Article

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Title
Carbon nanotube integration into MEMS devices
Authors
Keywords
-
Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 247, Issue 11-12, Pages 2635-2640
Publisher
Wiley
Online
2010-09-01
DOI
10.1002/pssb.201000109

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