Carbon nanotube integration into MEMS devices

标题
Carbon nanotube integration into MEMS devices
作者
关键词
-
出版物
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 247, Issue 11-12, Pages 2635-2640
出版商
Wiley
发表日期
2010-09-01
DOI
10.1002/pssb.201000109

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