Improvement of dislocation density in thick CVD single crystal diamond films by coupling H2/O2plasma etching and chemo-mechanical or ICP treatment of HPHT substrates

Title
Improvement of dislocation density in thick CVD single crystal diamond films by coupling H2/O2plasma etching and chemo-mechanical or ICP treatment of HPHT substrates
Authors
Keywords
-
Journal
Publisher
Wiley
Online
2014-04-28
DOI
10.1002/pssa.201431181

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