Designing a standard for strain mapping: HR-EBSD analysis of SiGe thin film structures on Si

Title
Designing a standard for strain mapping: HR-EBSD analysis of SiGe thin film structures on Si
Authors
Keywords
Electron backscattered diffraction, EBSD, Epitaxial SiGe–Si, Strain measurement, Standard
Journal
ULTRAMICROSCOPY
Volume 148, Issue -, Pages 94-104
Publisher
Elsevier BV
Online
2014-10-01
DOI
10.1016/j.ultramic.2014.09.007

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