High entropy alloy thin films deposited by magnetron sputtering of powder targets

Title
High entropy alloy thin films deposited by magnetron sputtering of powder targets
Authors
Keywords
Thin films, Magnetron sputter deposition, Powder targets, High entropy alloys
Journal
THIN SOLID FILMS
Volume 580, Issue -, Pages 71-76
Publisher
Elsevier BV
Online
2015-03-04
DOI
10.1016/j.tsf.2015.02.070

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